IEEE - Institute of Electrical and Electronics Engineers, Inc. - Theoretical overview of the large area plasma processing system (LAPPS)

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Manheimer, W.M. ; Fernsler, R. ; Lampe, M. ; Meger, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854829
Regular:

Summary form only given. An initial theoretical study of LAPPS has focused on plasma and free radical production, ion fluxes to substrates, uniformity of the plasma and flux for insulating and... View More

Advertisement