IEEE - Institute of Electrical and Electronics Engineers, Inc. - Experimental and numerical investigation of a planar type radio frequency inductively coupled oxygen plasma

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Chung, T.H. ; Seo, D.C. ; Chung, S.W. ; Yoon, H.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854818
Regular:

Summary form only given, as follows. Experimental and numerical investigations are performed on a radio frequency inductively coupled oxygen plasma. The plasma parameters such as charged species... View More

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