IEEE - Institute of Electrical and Electronics Engineers, Inc. - Measurement of Ar(1s/sub 2/) population in a carbon plume excited by ArF excimer laser using a laser absorption method

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Sakai, Y. ; Bratescu, M.A. ; Suda, Y. ; Mizuno, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854811
Regular:

Summary form only given. A laser absorption (LA) technique provides selective and absolute information on the excited species in discharge plasmas. We have been studying the processing of fine... View More

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