IEEE - Institute of Electrical and Electronics Engineers, Inc. - Investigation of magnetic guiding of laser plasmas for thin film deposition

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Redman, D.G. ; Roupassov, S. ; Tsui, Y.Y. ; Rankin, R. ; Capjack, C.E. ; Fedosejevs, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854808
Regular:

Summary form only given. One complication with pulsed laser deposition of thin films is the inclusion of micron and submicron size debris particles from the source material. These particles arise... View More

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