IEEE - Institute of Electrical and Electronics Engineers, Inc. - A molecular beam mass spectrometer for plasma jet chemical vapor deposition reactor diagnostics

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Kull, A.E. ; Cappelli, M.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854738
Regular:

Direct current (DC) plasma jets (also known as arcjets) are a particular form of high density, low pressure plasma source that produce a high velocity (5-10 km/sec) plasma stream (20-30%... View More

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