IEEE - Institute of Electrical and Electronics Engineers, Inc. - Local thermodynamic equilibrium analysis of the supersonic induction plasma jet

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Sember, V. ; Schwenk, A. ; Gravelle, D.V. ; Boulos, M.I.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854729
Regular:

Summary form only given, as follows. The inductively coupled radio frequency (RF) plasma has been the subject of numerous studies over the past three decades. One of its early applications was in... View More

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