IEEE - Institute of Electrical and Electronics Engineers, Inc. - Diagnostics and analyses of a laser produced organic vapor plasma

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Ding, G. ; Scharer, J.E. ; Cao, R. ; Kelly, K.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854718
Regular:

Summary form only given. A fast Langmuir probe technique is developed for diagnosing a plasma produced by a 193 nm laser ionizing an organic vapor, tetrakis(dimethyl-amino)ethylene (TMAE).... View More

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