IEEE - Institute of Electrical and Electronics Engineers, Inc. - A study on gas desorption from inductively coupled plasma chamber wall by optical emission spectroscopy method

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Shafiul, A.A.B.M. ; Shuyan Xu ; Yin-An Li
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854555
Regular:

Summary form only given. In nitriding stainless steel experiments in RF inductively coupled plasma chamber, optical emission spectroscopy (OES) measurements were carried out within the visible... View More

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