IEEE - Institute of Electrical and Electronics Engineers, Inc. - Thickness measurement for Cu and Ta thin films using optoacoustics

Proceedings of the IEEE 2000 International Interconnect Technology Conference

Author(s): Gostein, M. ; Bailey, T.C. ; Emesh, I. ; Diebold, A.C. ; Maznev, A.A. ; Banet, M. ; Joffe, M. ; Sacco, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Burlingame, CA, USA
Conference Date: 7 June 2000
Page(s): 176 - 178
ISBN (Paper): 0-7803-6327-2
DOI: 10.1109/IITC.2000.854317
Regular:

New all-optical, nondestructive metrology instruments for metal film thickness measurement have been developed using the opto-acoustic technique impulsive stimulated thermal scattering (ISTS). The... View More

Advertisement