IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integration of low-k spin-on polymer and Cu for Damascene

Proceedings of the IEEE 2000 International Interconnect Technology Conference

Author(s): Chang, W. ; Chiou, W.C. ; Li, L.J. ; Chao, L.C. ; Jang, S.M. ; Yu, C.H. ; Liang, M.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Burlingame, CA, USA
Conference Date: 7 June 2000
ISBN (Paper): 0-7803-6327-2
DOI: 10.1109/IITC.2000.854288
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