IEEE - Institute of Electrical and Electronics Engineers, Inc. - Realization of hybrid microfluidic systems using standard LTCC process

2000 Proceedings. 50th Electronic Components and Technology Conference

Author(s): Rebenklau, L. ; Wolter, K.-J. ; Howitz, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Las Vegas, NV, USA, USA
Conference Date: 21 May 2000
Page(s): 1,696 - 1,700
ISBN (Paper): 0-7803-5908-9
DOI: 10.1109/ECTC.2000.853448
Regular:

The paper reports some results of a cooperation research in which the possibility to realize microfluidic components and modules by using low temperature cofiring ceramic multilayer (LTCC-ML)... View More

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