IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integral thin film capacitors: Fabrication and integration issues

2000 Proceedings. 50th Electronic Components and Technology Conference

Author(s): Ramesh, S. ; Shutzberg, B.A. ; Giannelis, E.P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Las Vegas, NV, USA, USA
Conference Date: 21 May 2000
Page(s): 1,568 - 1,571
ISBN (Paper): 0-7803-5908-9
DOI: 10.1109/ECTC.2000.853423
Regular:

Although integral passive components have been used for over ten years, only recently has there been significant impetus to integrate. This is being driven by the need for miniaturization,... View More

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