IEEE - Institute of Electrical and Electronics Engineers, Inc. - A dry silver electromigration process to fabricate optical waveguides on glass substrates

2000 Proceedings. 50th Electronic Components and Technology Conference

Author(s): Chuang, R.W. ; Lee, C.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Las Vegas, NV, USA, USA
Conference Date: 21 May 2000
Page(s): 1,511 - 1,514
ISBN (Paper): 0-7803-5908-9
DOI: 10.1109/ECTC.2000.853414
Regular:

We present an improved method to fabricate low-loss waveguides on glass without the use of molten salts or liquid solutions. Preliminary results obtained so far are reported. This technique... View More

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