IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of silicon-on-reflector for Si-based resonant-cavity-enhanced photodetectors

2000 Proceedings. 50th Electronic Components and Technology Conference

Author(s): Cheng Li ; Qinqing Yang ; Haiyan Ou ; Qiming Wang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Las Vegas, NV, USA, USA
Conference Date: 21 May 2000
Page(s): 1,486 - 1,488
ISBN (Paper): 0-7803-5908-9
DOI: 10.1109/ECTC.2000.853409
Regular:

A novel silicon-on-reflector substrate for Si-based resonant-cavity-enhanced photodetectors has been fabricated by using Si-based sol-gel and smart-cut techniques. The Si/SiO/sub 2/... View More

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