IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new piezoresistive high pressure sensor utilizing combination of three-axis normal stress components

MHS'99. Proceedings of the 1999 International Symposium on Micromechantronics and Human Science. Towards the New Century

Author(s): Toriyama, T. ; Sawa, K. ; Tanimoto, Y. ; Sugiyama, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Nagoya, Japan, Japan
Conference Date: 23 November 1999
Page(s): 215 - 220
ISBN (Paper): 0-7803-5790-6
DOI: 10.1109/MHS.1999.820008
Regular:

A piezoresistive high pressure sensor utilizing a combination of three-axis normal stress components has been developed. Firstly, the principle, FEM analysis, fabrication and characteristics of a... View More

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