IEEE - Institute of Electrical and Electronics Engineers, Inc. - Excimer laser processing in nano-technology

MHS'99. Proceedings of the 1999 International Symposium on Micromechantronics and Human Science. Towards the New Century

Author(s): Kathuria, Y.P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Nagoya, Japan, Japan
Conference Date: 23 November 1999
Page(s): 169 - 172
ISBN (Paper): 0-7803-5790-6
DOI: 10.1109/MHS.1999.820000
Regular:

In the emerging field of microelectronics, microrobotics and nano-electromechanical systems (NEMS) it is often desirable to fabricate sub um order structure of solid surfaces in various... View More

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