IEEE - Institute of Electrical and Electronics Engineers, Inc. - Chemical processing and properties of functional ceramics

MHS'99. Proceedings of the 1999 International Symposium on Micromechantronics and Human Science. Towards the New Century

Author(s): Hirano, S. ; Yogo, T. ; Sakamoto, W. ; Kikuta, K. ; Kato, K. ; Takeichi, Y. ; Araki, Y. ; Saitoh, M. ; Ogasahara, S. ; Kohigashi, T. ; Ito, Y. ; Suzuki, K. ; Ukai, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Nagoya, Japan, Japan
Conference Date: 23 November 1999
Page(s): 11 - 18
ISBN (Paper): 0-7803-5790-6
DOI: 10.1109/MHS.1999.819976
Regular:

Functional ceramic films have been receiving great attention because of their potentials for emerging applications, which include integrated sensors, actuators and other devices responding to... View More

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