IEEE - Institute of Electrical and Electronics Engineers, Inc. - Evanescent electromagnetic field structures in inductively coupled plasma

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Shinohara, S. ; Takechi, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829605
Regular:

Summary form only given. Inductively coupled plasma (ICP) has been recognized as a high-density plasma source in the radio frequency (RF) range for plasma application fields. Although the... View More

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