IEEE - Institute of Electrical and Electronics Engineers, Inc. - Generation of high density plasma with large volume using pulsed glow discharge

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Takaki, K. ; Kitamura, D. ; Fujiwara, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829601
Regular:

Summary form only given. A new technique, Plasma Source Ion Implantation (PSII) for the surface modification of materials, was proposed by Conrad in 1989. This technique has been studied all over... View More

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