IEEE - Institute of Electrical and Electronics Engineers, Inc. - Diagnostics and experiments on LAPPS

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Leonhardt, D. ; Murphy, D.P. ; Walton, S.G. ; Meger, R.A. ; Fernsler, R.F. ; Pechacek, R.E.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829600
Regular:

Summary form only given. NRL is developing a new plasma processing reactor called the 'Large Area Plasma Processing System' with applications to semiconductor processing and other forms of surface... View More

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