IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microhollow cathode discharge excimer light sources

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): El-Habachi, A. ; Moselhy, M. ; El-Dakroury, A. ; Schoenbach, K.H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829571
Regular:

Summary form only given. Microhollow Cathode discharges are non-equilibrium, high pressure, direct current discharges. By reducing the diameter of the cathode opening in a hollow cathode discharge... View More

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