IEEE - Institute of Electrical and Electronics Engineers, Inc. - High pressure N/sub 2/, O/sub 2/ and air mixture plasmas produced by a radiofrequency Helicon plasma source

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Scharer, J.E. ; Guo, X.M. ; Kelly, K.L. ; Gui, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829486
Regular:

Summary form only given, as follows. High pressure (10-760 Torr) plasmas of N/sub 2/, O/sub 2/ and air gas mixture are investigated in this work by using a radiofrequency helicon plasma source.... View More

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