IEEE - Institute of Electrical and Electronics Engineers, Inc. - A polyphase low frequency RF power supply for a one atmosphere uniform glow discharge plasma (OAUGDP)

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Karakaya, F. ; Sherman, D.M. ; Roth, J.R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829450
Regular:

Summary form only given. A flexible, reliable, and robust RF power supply capable of delivering the frequency and voltage required to energize the One Atmosphere Uniform Glow Discharge Plasma... View More

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