IEEE - Institute of Electrical and Electronics Engineers, Inc. - Time evolution of ion energy distributions and optical emissions in pulsed radio frequency plasmas

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Misakian, M. ; Benck, E. ; Wang, Y. ; Olthoff, J. ; Roberts, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829441
Regular:

Summary form only given. Pulsed inductively coupled plasmas have recently received considerable attention because of their possible advantages over continuous plasma discharges in industrial... View More

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