IEEE - Institute of Electrical and Electronics Engineers, Inc. - Langmuir probe diagnostics of electronegative radio frequency inductively coupled plasma

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Chung, T.H. ; Seo, D.C. ; Chung, S.W. ; Yoon, H.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829438
Regular:

Summary form only given, as follows. Langmuir probe diagnostics are performed on a electronegative radio frequency inductively coupled oxygen plasma. With a simultaneous use of single probe and... View More

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