IEEE - Institute of Electrical and Electronics Engineers, Inc. - Comparison of electron density measurements in planar inductively coupled plasmas by microwave interferometer and Langmuir probe

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Guo, W. ; Wu, R.L.C. ; DeJoseph, C.A., Jr.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829344
Regular:

Summary form only given, as follows. A Langmuir probe and a heterodyne microwave interferometer have been used to characterize a planar inductively coupled ion source operated in one of two... View More

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