IEEE - Institute of Electrical and Electronics Engineers, Inc. - A traveling wave driven, inductively coupled large area plasma source

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Wu, Y. ; Lidberman, M.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829322
Regular:

Summary form only given. A large area inductive plasma source driven by a 13.56 MHz traveling wave has been investigated. Launching a traveling wave eliminates standing wave effects to obtain a... View More

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