IEEE - Institute of Electrical and Electronics Engineers, Inc. - Two-dimensional modeling of nonlocal electron heating in inductively coupled plasma sources

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Hu, Y. ; Lin, T.L. ; Chang, C.W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829307
Regular:

Summary form only given, as follows. Nonlocal (collisionless) electron heating can be important in low-pressure inductively coupled rf discharges. We have developed a two-dimensional,... View More

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