IEEE - Institute of Electrical and Electronics Engineers, Inc. - The dependence of the decay time constant on the chamber size and gas pressure in a pulsed ICP

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Lin, T.-L. ; Chien, Y.-T. ; Leou, K.-C. ; Tsai, C.-H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829306
Regular:

Summary form only given, as follows. The electron temperature in a pulsed inductively coupled plasma (ICP) can be significantly lowered when it is operated in a pulsed mode. Lower electron... View More

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