IEEE - Institute of Electrical and Electronics Engineers, Inc. - Experimental characterization of a pulsed ICP discharge

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference

Author(s): Leou, K.C. ; Chien, Y.T. ; Yang, Y.M. ; Lin, T.L. ; Tsai, C.H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Monterey, CA, USA, USA
Conference Date: 24 June 1999
ISBN (Paper): 0-7803-5224-6
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1999.829305
Regular:

Summary form only given. Pulsed low-pressure high-density plasmas attracted a great deal of attention recently owing to their applications in ULSI processing. It has been demonstrated that... View More

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