IEEE - Institute of Electrical and Electronics Engineers, Inc. - Self-assembled micro-scanner fabricated by surface-micromachining technology

Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Edition. CLEO '99. Conference on Lasers and Electro-Optics

Author(s): G.D. Su ; M.C. Wu
Sponsor(s): IEEE/Lasers & Electro-Opt. Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Baltimore, MD, USA, USA
Conference Date: 28 May 1999
Page Count: 2
Page(s): 196 - 197
ISBN (Paper): 1-55752-595-1
DOI: 10.1109/CLEO.1999.834075
Regular:

Summary form only given. Optical scanners are used in a wide variety of applications. Scanning micromirrors fabricated using the micromachining technology is very attractive because of smaller... View More

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