IEEE - Institute of Electrical and Electronics Engineers, Inc. - Deconvolution of local surface response from surface topography in optical profilometry by a dual-scan method

Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Edition. CLEO '99. Conference on Lasers and Electro-Optics

Author(s): Chao-Wei Tsai ; Chau-Hwang Lee ; Jyhpyng Wang
Sponsor(s): IEEE/Lasers & Electro-Opt. Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Baltimore, MD, USA, USA
Conference Date: 28 May 1999
Page Count: 1
ISBN (Paper): 1-55752-595-1
DOI: 10.1109/CLEO.1999.833815
Regular:

Summary form only given. In optical profilometry the measured raw data represent a convolution of local surface response to the probing light and surface topography. For example, the reflectivity... View More

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