IEEE - Institute of Electrical and Electronics Engineers, Inc. - A model of a 300 mm wafer fabrication line

Proceedings of 1999 Winter Conference on Simulation

Author(s): Campbell, P.L. ; Rohan, D. ; MacNair, E.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Phoenix, AZ, USA
Conference Date: 5 December 1999
Volume: 1
ISBN (Paper): 0-7803-5780-9
DOI: 10.1109/WSC.1999.823305
Regular:

Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300-mm wafer... View More

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