IEEE - Institute of Electrical and Electronics Engineers, Inc. - Evaluation of cluster tool throughput for thin film head production

Proceedings of 1999 Winter Conference on Simulation

Author(s): Koehler, E.J. ; Wulf, T.M. ; Bruska, A.C. ; Seppanen, M.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Phoenix, AZ, USA
Conference Date: 5 December 1999
Volume: 1
ISBN (Paper): 0-7803-5780-9
DOI: 10.1109/WSC.1999.823199
Regular:

This paper describes the application of simulation for analyzing cluster tool cycle times and cluster tool capacity planning. The objective of this project was to develop a flexible and expandable... View More

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