IEEE - Institute of Electrical and Electronics Engineers, Inc. - Toward a novel planar circuit compatible silicon micromachined waveguide

IEEE 8th Topical Meeting on Electrical Performance of Electronic Packaging

Author(s): Becker, J.P. ; Katehi, L.P.B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Diego, CA, USA, USA
Conference Date: 25 October 1999
Page(s): 221 - 224
ISBN (Paper): 0-7803-5597-0
DOI: 10.1109/EPEP.1999.819230
Regular:

A novel, completely packaged planar-fed silicon micromachined waveguide/resonator is proposed. Simulated results for a Ka-band resonator are given, along with initial results of the required... View More

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