IEEE - Institute of Electrical and Electronics Engineers, Inc. - Properties of amorphous AlCuY alloy metallizations

IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society

Author(s): Berger, L. ; Mrosk, J.W. ; Ettl, C. ; Fecht, H.J. ; Flege, S. ; Hahn, H. ; Wolff, U.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Jose, CA, USA, USA
Conference Date: 29 November 1999
Volume: 1
ISBN (Paper): 0-7803-5735-3
DOI: 10.1109/IECON.1999.822169
Regular:

Amorphous metal alloys are ideally suited for interconnects in micro-electromechanical systems (MEMS) because of their resistance against migration and diffusion, and their stability in... View More

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