IEEE - Institute of Electrical and Electronics Engineers, Inc. - Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems

IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society

Author(s): Tsai, K.-Y. ; Yen, J.-Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Jose, CA, USA, USA
Conference Date: 29 November 1999
Volume: 1
ISBN (Paper): 0-7803-5735-3
DOI: 10.1109/IECON.1999.822161
Regular:

Most microlithographic steppers use a dual stage design to achieve both large stroke and high precision motion. The fine-stage of the stepper compensates for the insufficient resolution of the... View More

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