IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing

IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society

Author(s): Lim, K.W. ; Luo, J. ; Gu, J. ; Poh, Y.P. ; Tan, W.W. ; Loh, A.P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: San Jose, CA, USA, USA
Conference Date: 29 November 1999
Volume: 1
ISBN (Paper): 0-7803-5735-3
DOI: 10.1109/IECON.1999.822160
Regular:

Lithography is a major process in wafer manufacturing. With increasing wafer size and decreasing feature size, it is important to have precise control of temperature and other environmental... View More

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