IEEE - Institute of Electrical and Electronics Engineers, Inc. - A MEMS high-speed rotation measurement system with MCNC fabricated motion and reference sensors using wireless transmission

Proceedings of IEEE Conference on Multisensor Fusion and Integration for Intelligent Systems

Author(s): Sun, W. ; Tao Mei ; Ho, W.-T. ; Li, W.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Taipei, Taiwan, Taiwan
Conference Date: 18 August 1999
Page(s): 226 - 231
ISBN (Paper): 0-7803-5801-5
DOI: 10.1109/MFI.1999.815994
Regular:

A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm/sup 2/ was developed using the MCNC multi-user MEMS processes. This paper... View More

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