IEEE - Institute of Electrical and Electronics Engineers, Inc. - System modeling and robust design of microaccelerometer using piezoelectric thin film

Proceedings of IEEE Conference on Multisensor Fusion and Integration for Intelligent Systems

Author(s): Jyh-Cheng Yu ; Chiang-Bin Lan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Taipei, Taiwan, Taiwan
Conference Date: 18 August 1999
Page(s): 99 - 104
ISBN (Paper): 0-7803-5801-5
DOI: 10.1109/MFI.1999.815972
Regular:

This paper starts from the structure analysis and system modeling of piezoelectric microaccelerometer using piezoelectric thin film. The simulation model demonstrates the interaction of structure... View More

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