IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of a non-contact conveyance system composed of distributed nozzle units

1999 7th IEEE Conference on Emerging Technologies and Factory Automation. Proceedings ETFA'99

Author(s): Konishi, S. ; Mizuguchi, Y. ; Ohno, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Barcelona, Spain, Spain
Conference Date: 18 October 1999
Volume: 1
ISBN (Paper): 0-7803-5670-5
DOI: 10.1109/ETFA.1999.815409
Regular:

A non-contact manipulation is required in order to treat such objects as semiconductor wafers. This paper deals with a conveyance system using an air flow to levitate and move the objects. It is... View More

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