IEEE - Institute of Electrical and Electronics Engineers, Inc. - Edge exclusion limits of the Prometrix 4-point probe

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Sawyer, W.D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812204
Regular:

This paper contains measurements of the edge exclusion limit of the Prometrix RS55/tc 4-point probe. Using a method of cleaving 8 inch wafers the edge exclusion limit is measured for various n-... View More

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