IEEE - Institute of Electrical and Electronics Engineers, Inc. - Long term time dependent variations in thermal wave monitor wafers

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Kamenitsa, D.E. ; McCoy, W.R. ; Ostrom, L. ; Li Zhou
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812169
Regular:

Implanted reference wafers, often referred to as "golden wafers", are generally used to verify the long term repeatability of metrology equipment and, by extension, the repeatability of the... View More

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