IEEE - Institute of Electrical and Electronics Engineers, Inc. - Beam tuning with continuously variable aperture

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Murakami, T. ; Sugitani, M. ; Tsukihara, M. ; Sogabe, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812145
Regular:

In order to obtain more productivity on the high energy ion implanter, chained implantations are used. The chained implantations man a combination of recipes with the same species but different... View More

Advertisement