IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new dose controller for the genus 1510/1520/Kestrel MeV ion implanters

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Richards, S. ; Cook, B. ; Eide, P. ; Flint, B. ; Gilbert, D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812140
Regular:

A new Dose Controller has been developed for the Genus 1510/1520/Kestrel family of MeV Ion Implanters. The new Controller offers selectable scan times, permitting the end user to control the... View More

Advertisement