IEEE - Institute of Electrical and Electronics Engineers, Inc. - Thermal based mass flow control for ion implant SDS(R) applications

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Krell, J. ; Brown, B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812131
Regular:

The economic advantage of SDS Gas Source feed materials depends largely upon maximum utilization of cylinder contents. Recent improvements in flow control technology have made it possible to... View More

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