IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel species implantation using Applied Materials 9500/spl times/R/sup TM/ and /spl times/R LEAP/sup TM/ implanters

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Banks, P. ; Dobson, M. ; Krimbacher, B. ; Allen, A. ; Murrell, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812127
Regular:

An increasing range of implanted species are being used to engineer carrier doping profiles. Applications include pre-amorphisation and layer mixing (group IV elements), shallow junctions and... View More

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