IEEE - Institute of Electrical and Electronics Engineers, Inc. - InCl/sub 3/ as vaporizer feed material for the Bernas dual vaporizer in the E220/500 implanters

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Reyes, J.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812108
Regular:

The properties of indium as an implant in device fabrication are discussed. InCl/sub 3/ is the preferred vaporizer feed material to deliver indium ions to the source. The selection of InCl/sub 3/... View More

Advertisement