IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optimization of the delivery system for SDS/sup R/ gas sources used in ion implantation

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): McManus, J.V. ; Mayer, J.J. ; Hazel, J.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812104
Regular:

Sub-atmospheric gas sources for ion implantation have been in commercial use in new and installed base systems since 1994. Many of the implanters in the installed base were not originally... View More

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