IEEE - Institute of Electrical and Electronics Engineers, Inc. - VIISion PLUS performance improvements

1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Author(s): Gammel, G. ; Brennan, D. ; Rushton, E. ; Sullivan, P. ; Zhao, Z.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Kyoto, Japan, Japan
Conference Date: 22 June 1998
Volume: 1
ISBN (Paper): 0-7803-4538-X
DOI: 10.1109/IIT.1999.812093
Regular:

In a continuous improvement program that began fall '97, several improvements have been made to the VIISion PLUS batch high current ion implanter, and others are being incorporated. First, the... View More

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